{tpc_global/vacuum/ep/epm_asmtab.prj},{NB=EPM05015 },{IDNR=},{TYPE=EP},{NOZZLE=05},{BODY=S-Unit Type},{MANIFOLD=01},{VALVE=},{VOLTAGE=5},{SWITCH= },{CONECTOR= },{CV=},{PPATH=epm_asmtpl.prj},{VE=2}

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		LINA Bill of material	IDNR Ident number ⁿ/ₐ	BODY Body ⁿ/ₐ	VE [mm]

EP05M01-5

S-Unit Type

2

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